1.

Conference Proceedings

Conference Proceedings
Holmes, S. J. ; Furukawa, T. ; Hakey, M. C. ; Horak, D. V. ; Rabidoux, P. A. ; Chen, K. -J. R. ; Huang, W. -S. ; Khojasteh, M. ; Patel, N.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.348-359,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
2.

Conference Proceedings

Conference Proceedings
Kwong, R.W. ; Khojasteh, M. ; Lawson, P. ; Hughes, T. ; Varanasi, P.R. ; Brunsvold, B. ; Allen, R.D. ; Brock, P.J. ; Sooriyakumaran, R. ; Truong, H.D. ; Mahorowala, A.P. ; Medeiros, D.R.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.403-409,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
3.

Conference Proceedings

Conference Proceedings
Khojasteh, M. ; Chen, K.R. ; Kwong, R.W. ; Lawson, M.C. ; Varanasi, P.R. ; Patel, K.S. ; Kobayashi, E.
Pub. info.: Advances in Resist Technology and Processing XX.  1  pp.187-194,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039