Holmes, S. J. ; Furukawa, T. ; Hakey, M. C. ; Horak, D. V. ; Rabidoux, P. A. ; Chen, K. -J. R. ; Huang, W. -S. ; Khojasteh, M. ; Patel, N.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.348-359, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering