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Effect of N2 Plasma Treatments on Dry Etch Damage in n- and p-type GaN

Author(s):
Kent, D. G.
Lee, K.P.
Zhang, A. P.
Luo, B.
Overberg, M.E.
Abernathy, C. R.
Ren, F.
Mackenzie, K. D.
Pearton, S.J.
Nakagawa, Y.
5 more
Publication title:
GaN and related alloys - 2000 : symposium held November 27-December 1, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
639
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995499 [1558995498]
Language:
English
Call no.:
M23500/639
Type:
Conference Proceedings

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