1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF RAPID THERMALLY NITRATED TITATNIUM FILMS CONTACTING SILICIDED AND NON-SILICIDED JUNCTIONS
Chittipeddi, S. ; Kelly, M. J. ; Dziuba, C. M. ; Irwin, R. B. ; Kahora, P. M. ; Kannan, V. C ; Cochran, W. T.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.387-392,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
2.

Conference Proceedings
Conference Proceedings
2. OXIDIZED POROUS SILICON MOISTURE SENSORS FOR EVALUATION OF MICROELECTRONIC PACKAGING
Kelly, M. J. ; Guilinger, T. R. ; Peterson, D. W. ; Tuck, M. R. ; Sweet, J. N.
Pub. info.: Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.313-318,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 225
3.

Conference Proceedings
Conference Proceedings
3. Porous Silicon Structural Evolution from In-Situ Luminescence and Raman Measurements
Tallant, D. R. ; Kelly, M. J. ; Guilinger, T. R. ; Simpson, R. L.
Pub. info.: Microporous and macroporous materials.  pp.171-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 431
4.

Conference Proceedings
Conference Proceedings
4. POROSITY DETERMINATIONS IN BURIED AND SURFACE LAYERS OF POROUS SILICON
Guilinger, T. R. ; Kelly, M. J. ; Tsao, S. S.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.455-460,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
5.

Conference Proceedings
Conference Proceedings
5. Electrochemical Microfabrication Utilizing Porous Silicon
Howard, A. J. ; Guilinger, T. R. ; Kelly, M. J. ; Stevenson, J. O. ; Joyce, S. A. ; Houston, J. E. ; Michalske, T. A.
Pub. info.: AIChE ANNUAL MEETING -LOS ANGELES, CA- NOVEMBER 17-22, 1991.  1991.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1991
6.

Conference Proceedings
Conference Proceedings
6. NON-DESTRUCTIVE CHARACTERIZATION OF POROUS SILICON USING X-RAY REFLECTIVITY
Chason, E. ; Guilinger, T. R. ; Kelly, M. J. ; Headley, T. J. ; Howard, A. J.
Pub. info.: Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.321-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 358