1.

Conference Proceedings
Conference Proceedings
1. Silicon mirror arrays fabricated by using bulk and surface micromachining
Gessner,T. ; Dotzel,W. ; Billep,D. ; Hahn,R. ; Kaufmann,C. ; Kehr,K. ; Kurth,S. ; Steiniger,C. ; Wollmann,U.
Pub. info.: Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California.  pp.296-305,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3008
2.

Conference Proceedings
Conference Proceedings
2. Synchronously working micromirrors for beam steering:design and application aspects
Kurth,S. ; Kehr,K. ; Mehner,J. ; Kaufmann,C. ; Hahn,R. ; Seidel,R. ; Doetzei,W. ; Cessner,T.
Pub. info.: Optical scanning : design and applications : 21-22 July 1999, Denver, Colorado.  pp.63-73,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3787
3.

Conference Proceedings
Conference Proceedings
3. Analogously working micromirror arrays
Kehr,K. ; Kurth,S. ; Mehner,J. ; Kaufmann,C. ; Hahn,R. ; Dotzel,W. ; Gessner,T.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.80-89,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878
4.

Conference Proceedings
Conference Proceedings
4. Low-temperature approaches for fabrication of high-frequency microscanners
Hiller,K. ; Hahn,R. ; Kaufmann,C. ; Kurth,S. ; Kehr,K. ; Gessner,T. ; Dotzel,W. ; Wiemer,M. ; Schubert,I.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.58-66,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878