Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.367-372, 1988. Pittsburgh, Pa.. Materials Research Society
Miyatake, T. ; Takata, T. ; Yamaguchi, K. ; Takamuku, K. ; Koshizuka, N. ; Tanaka, S. ; Shibutani, K. ; Hayashi, S. ; Ogawa, R. ; Kawate, Y.
Pub. info.:
Gas pressure effects on materials processing and design : symposium held December 3-5, 1991, Boston, Massachusetts, U.S.A.. pp.319-324, 1992. Pittsburgh. Materials Research Society