1.

Conference Proceedings

Conference Proceedings
tachibana, H. ; Nakaue, A. ; Kawate, Y.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.367-372,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
2.

Conference Proceedings

Conference Proceedings
Miyatake, T. ; Takata, T. ; Yamaguchi, K. ; Takamuku, K. ; Koshizuka, N. ; Tanaka, S. ; Shibutani, K. ; Hayashi, S. ; Ogawa, R. ; Kawate, Y.
Pub. info.: Gas pressure effects on materials processing and design : symposium held December 3-5, 1991, Boston, Massachusetts, U.S.A..  pp.319-324,  1992.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 251