1.

Conference Proceedings

Conference Proceedings
Wei,J. ; Kawarada,H. ; Hiraki,A.
Pub. info.: Plasma properties, deposition and etching.  pp.465-476,  1993.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 140-142
2.

Conference Proceedings

Conference Proceedings
Tsugawa,K. ; Hokazono,A. ; Noda,H. ; Kitatani,K. ; Morita,K. ; Kawarada,H.
Pub. info.: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part2  pp.977-980,  1998.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 264-268
3.

Conference Proceedings

Conference Proceedings
Takamatsu,R. ; Sato,M. ; Kawarada,H.
Pub. info.: Real-Time Imaging II.  pp.155-163,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3028