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Advantages of SOI technology in low-voltage ULSIs (Invited Paper)

Author(s):
Yoshimi,M. ( Toshiba Corp. (Japan) )
Kawanaka,S. ( Toshiba Corp. (Japan) )
Yamada,T. ( Toshiba Corp. (Japan) )
Terauchi,M. ( Toshiba Corp. (Japan) )
Shino,T. ( Toshiba Corp. (Japan) )
Fuse,T. ( Toshiba Corp. (Japan) )
Oowaki,Y. ( Toshiba Corp. (Japan) )
Watanabe,S. ( Toshiba Corp. (Japan) )
3 more
Publication title:
Microelectronic Device Technology : 1-2 October 1997, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3212
Pub. Year:
1997
Page(from):
178
Page(to):
187
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426444 [081942644X]
Language:
English
Call no.:
P63600/3212
Type:
Conference Proceedings

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