1.

Conference Proceedings
Conference Proceedings
1. Recent Progress in Low-Dose SIMOX Wafers Fabricated with Lateral-Thermal Oxidation (ITOX) Process (Invited)
Matsumura, A ; Kawamura, K ; Mizutani, T ; Takaysma, S ; Hamaguchi, I ; Nagatake, Y
Pub. info.: Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.79-92,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-3
2.

Conference Proceedings
Conference Proceedings
2. Quality innovation of SIMOX wafers by low dose and high temperature oxidation techniques
Tachimori, M ; Masui, S ; Nakajima, T ; Kawamura, K ; Hamaguchi, I ; Yano, T ; Nagatake, Y
Pub. info.: Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices.  pp.53-62,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-3