1.

Conference Proceedings

Conference Proceedings
Kikuchi,K. ; Ohnuma,H. ; Kawahira,H.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.121-131,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings

Conference Proceedings
Kagami,I. ; Ishikawa,K. ; Kakuta,D. ; Kawahira,H.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.953-963,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings

Conference Proceedings
Kawahira,H. ; Hayashi,N. ; Hamada,H.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.318-327,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
4.

Conference Proceedings

Conference Proceedings
Katsumata,M. ; Kawahira,H. ; Nozawa,S.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.198-205,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
5.

Conference Proceedings

Conference Proceedings
Ohnuma,H. ; Tsudaka,K. ; Kawahira,H.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.145-153,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
6.

Conference Proceedings

Conference Proceedings
Ueki,S. ; Ashida,I. ; Kawahira,H.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.589-600,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
7.

Conference Proceedings

Conference Proceedings
Tomita,M. ; Ohnuma,H. ; Koyama,M. ; Kawahira,H.
Pub. info.: 15th Annual BACUS Symposium on Photomask Technology and Management.  pp.546-557,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2621
8.

Conference Proceedings

Conference Proceedings
Kagami,I. ; Sugawara,M. ; Kawahira,H. ; Tsudaka,K. ; Ishikawa,K. ; Nozawa,S.
Pub. info.: 15th Annual BACUS Symposium on Photomask Technology and Management.  pp.445-456,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2621
9.

Conference Proceedings

Conference Proceedings
Sugawara,M. ; Ishikawa,K. ; Kawahira,H. ; Kagami,I. ; Nozawa,S.
Pub. info.: 15th Annual BACUS Symposium on Photomask Technology and Management.  pp.457-472,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2621
10.

Conference Proceedings

Conference Proceedings
Katsumata,M. ; Kawahira,H. ; Sugawara,M. ; Nozawa,S.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.83-91,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884