1.

Conference Proceedings

Conference Proceedings
Mukherjee-Roy, M. ; Wei, N.S. ; Kumar, R. ; Kawada, S.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.703-711,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
2.

Conference Proceedings

Conference Proceedings
Maetoko, K. ; Tange, K. ; Fukuma, H. ; Yoshioka, N. ; Kawada, S. ; Ishizuka, M. ; Sasaki, T. ; Sauer, C. A.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.350-357,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748