1.
|
Conference Proceedings
|
Mukherjee-Roy, M. ; Wei, N.S. ; Kumar, R. ; Kawada, S.
Pub. info.: |
Advances in Resist Technology and Processing XIX. Part Two pp.703-711, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4690 |
|
2.
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Conference Proceedings
|
Maetoko, K. ; Tange, K. ; Fukuma, H. ; Yoshioka, N. ; Kawada, S. ; Ishizuka, M. ; Sasaki, T. ; Sauer, C. A.
Pub. info.: |
Photomask and X-Ray Mask Technology VI. pp.350-357, 1999. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3748 |
|