1.

Conference Proceedings
Conference Proceedings
1. The effects of chemical gradients and photoresist composition on lithographically generated line edge roughness
Chapman, G. ; Poon, D. ; Choo, C. ; Tu, Y. ; Dykes, J. ; Wang, J. ; Peng, J. ; Lennard, W. ; Kavanagh, K.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.368-379,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. CHRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING
Gyulai, J. ; Fastow, R. ; Kavanagh, K. ; Thompson, M. O. ; Palmstrom, C. J. ; Hewett, C. A. ; Mayer, J, W,
Pub. info.: Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.455-462,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 13
3.

Conference Proceedings
Conference Proceedings
3. PARTICLE SIZE EFFECTS IN YAG:CR PHOSPHORS
McKittrick, J. ; Hoghooghi, B. ; Dubbelday, W. ; Kavanagh, K. ; Kinsman, K. ; Shea, L. ; Sluzky, E.
Pub. info.: Scintillator and phosphor materials : symposium held April 6-8, 1994, San Francisco, California, U.S.A..  pp.519-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 348