1.

Conference Proceedings
Conference Proceedings
1. 31 New Materials, Processes and Device Structures for 65nm CMOS Technology Node and Beyond
Nguyen, B.-Y. ; Them, A. ; Zhang, D. ; White, T. ; Sadaka, M. ; Triyoso, D. ; Schaeffer, J. ; Goolsby, B. ; Dhandapani, V. ; Nguyen, T. ; Vartanian, V. ; McCormick, L. ; Theodore, D. ; Zollner, S. ; Xie, Q. ; Wang, X.-D. ; Canonico, M. ; Kotte, M. ; Shi, Z. ; Mathew, L. ; Zavala, M. ; Parker, C. ; Cottard, H. ; Hildreth, J. ; Prabhu, L. ; Rai, R. ; Murphy, S. ; Montgomery, P. ; Kalpat, S. ; Ramon, M. ; Demkov, A. ; Taylor, B. ; Gilmer, D. ; Adams, V. ; Jiang, J. ; Chen, J. ; Chang, C.-H. ; Kaushik, V. ; Chandna, L. ; Sadd, M. ; Barr, A. ; Vandooren, A. ; Pham, D. ; Mendlcino, M. ; Cheek, J. ; Tseng, H. ; White, B. ; Tobin, P. ; Orlowski, M. ; Venkatesan, S. ; Mogab, J. (Invited Paper)
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.259-273,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
2.

Conference Proceedings
Conference Proceedings
2. High-k Dielectrics Integration Prospects (Invited paper)
Kubicek, S. ; Van Elshocht, S. ; Delabie, A. ; Yamamoto, K. ; Beckx, S. ; Claes, M. ; Van Hoornick, N. ; Kwak, D.-H. ; Hyun, S. ; Rothschild, A. ; Veloso, A. ; Anil, K. ; Lujan, G. ; Kittle, J.A. ; Lauwers, A. ; Kaushik, V. ; Niwa, M. ; De Gendt, S. ; Heyns, M. ; Jurczak, M. ; Biesemans, S.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.169-192,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
3.

Conference Proceedings
Conference Proceedings
3. Compatibility of Polysilicon with HfO2-based Gate Dielectrics for CMOS Applications
Kaushik, V. ; De Gendt, S. ; Caymax, M. ; Young, E. ; Rohr, E. ; Van Elshocht, S. ; Delabie, A. ; Claes, M. ; Shi, X. ; Chen, I. ; Carter, R. ; Conard, T. ; Vandervorst, W. ; Schaekers, M. ; Heyns, M.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.391-396,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
4.

Conference Proceedings
Conference Proceedings
4. Tantalum Pentoxide Gate Dielectrics Formed by Tantalum Oxidation
Hobbs, C. ; Hegde, R. ; Maiti, B. ; Nagabushnam, R. ; La, L. ; Reid, K. ; Dip, A. ; Grove, L. ; Conner, J. ; Kaushik, V. ; Prabhu, L. ; Anderson, A. ; Bagchi, S. ; Mendonca, J. ; Tobin, P.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.379-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
5.

Conference Proceedings
Conference Proceedings
5. Integration of Multi-Level Copper Metallization into a High-Performance Sub-0.25 ｦﾌm Technology
Venkatraman, R. ; Jain, A. ; Farkas, J. ; Mendonca, J. ; Hamilton, G. ; Capasso, C. ; Denning, D. ; Simpson, C. ; Rogers, B. ; Frisa, L. ; Ong, T. P. ; Herrick, M. ; Kaushik, V. ; Gregory, R. ; Apen, E. ; Angyal, M. ; Filipiak, S. ; Crabtree, P. ; Sparks, T. ; Anderson, S.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.41-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
6.

Conference Proceedings
Conference Proceedings
6. 13 High-k Gate Stack Engineering - towards Meeting Low Standby Power and High Performance Targets
De Gendt, S. ; Brunco, D. ; Caymax, M. ; Canard, T. ; Date, L. ; Delabie, A. ; Deweerd, W. ; Groeseneken, G. ; Houssa, M. ; Hyun, S. ; Kaushik, V. ; Kubicek, S. ; Maes, J. ; Pantisano, L. ; Ragnarsson, L. ; Rohr, E. ; Schram, T. ; Shimamoto, Y. ; Sleeckx, E. ; Vandervorst, W. ; Van Elshocht, S. ; Yamamoto, K. ; Witters, T. ; Zhao, C. ; Zimmerman, P. ; Heyns, M. (Invited Paper)
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.109-117,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
7.

Conference Proceedings
Conference Proceedings
7. Epitaxial Oxide Films on Silicon: Growth, Modeling and Device Properties
Droopad, R. ; Wang, J. ; Eisenbeiser, K. ; Yu, Z. ; Ramdani, J. ; Curless, J.A. ; Overgaard, C.D. ; Finder, J.M. ; Hallmark, J.A. ; Kaushik, V. ; Nguyen, B.Y. ; Marshall, D.S. ; Ooms, W.J.
Pub. info.: Recent developments in oxide and metal epitaxy : theory and experiment.  pp.155-166,  2000.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 619
8.

Conference Proceedings
Conference Proceedings
8. On the Nature of Weak Spots in High-k Layers Submitted to Anneals
Petry, J. ; Vandervorst, W. ; Richard, O. ; Conard, T. ; DeWolf, P. ; Kaushik, V. ; Delabie, A. ; Elshocht, S.Van
Pub. info.: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.203-210,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 811
9.

Conference Proceedings
Conference Proceedings
9. Scalability of MOCVD-Deposited Hafnium Oxide
Elshocht, S. Van ; Carter, R. ; Caymax, M. ; Claes, M. ; Conard, T. ; Date, L. ; Gendt, S. De ; Kaushik, V. ; Kerber, A. ; Kluth, J. ; Lujan, G. ; Petry, J. ; Pique, D. ; Richard, O. ; Rohr, E. ; Shimamoto, Y. ; Tsai, W. ; Heyns, M. M.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.59-64,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
10.

Conference Proceedings
Conference Proceedings
10. NUCLEATION AND GROWTH OF CVD Si THIN FILMS: AFM, SE AND TEM ANALYSIS
Paulson, W. M. ; Hegde, R. I. ; Doris, B. B. ; Kaushik, V. ; Tobin, P. J. ; Fitch, J. ; McGahan, W. A. ; Woollam, J. A.
Pub. info.: Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA.  pp.77-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 355