1.

Conference Proceedings
Conference Proceedings
1. Photomask fabrication feasibility for next-generation reticle format
Katsumata,M. ; Kawahira,H. ; Nozawa,S.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.198-205,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
2.

Conference Proceedings
Conference Proceedings
2. Chemically amplified resist process for 0.25-ｦﾌm-generation photomasks
Katsumata,M. ; Kawahira,H. ; Sugawara,M. ; Nozawa,S.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.83-91,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884
3.

Conference Proceedings
Conference Proceedings
3. Magneic neutral loop discharge etching for 130-nm generation photomask fabrication
Katsumata,M. ; Kawahira,H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.210-217,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
4.

Conference Proceedings
Conference Proceedings
4. Chemically amplified resist process for 0.25-ｦﾌm generation photomasks
Katsumata,M. ; Kawahira,H. ; Sugawara,M. ; Nozawa,S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.96-104,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
5.

Conference Proceedings
Conference Proceedings
5. Manufacturing feasibility of OPC masks for 0.25-ｦﾌm rule devices
Kawahira,H. ; Katsumata,M. ; Tsudaka,K. ; Ogura,A. ; Tomita,M. ; Nozawa,S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.22-33,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793