1.

Conference Proceedings

Conference Proceedings
Lafontan,X. ; Pressecq,F. ; Perez,G. ; Dufaza,C. ; Karam,J.-M.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.11-21,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
2.

Conference Proceedings

Conference Proceedings
Dumitrescu,M.M. ; Iancu,O.D. ; Karam,J.-M.
Pub. info.: SIOEL '99 : Sixth Symposium on Optoelectronics : 22-24 September 1999, Bucharest, Romania.  pp.413-422,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4068
3.

Conference Proceedings

Conference Proceedings
Karam,J.-M. ; Courtois,B. ; Rencz,M. ; Poppe,A. ; Szekely,V.
Pub. info.: Microlithography and Metrology in Micromachining II.  pp.236-245,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2880
4.

Conference Proceedings

Conference Proceedings
Poppe,A. ; Rencz,M. ; Szekely,V. ; Karam,J.-M. ; Courtois,B. ; Hofmann,K. ; Glesner,M.
Pub. info.: Micromachined Devices and Components.  pp.215-224,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2642