Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA. pp.11-21, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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SIOEL '99 : Sixth Symposium on Optoelectronics : 22-24 September 1999, Bucharest, Romania. pp.413-422, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering