1.

Conference Proceedings
Conference Proceedings
1. Ultrafast Silicon Based Internal Photoemission Detectors ..
Buchal, Ch. ; Kappius, L. ; Lipinsky, Th. ; Loken, M. ; Mantl, S.
Pub. info.: Flat-panel displays and sensors - principles, materials and processes : symposium held April 4-9, 1999, San Francisco, California, U.S.A..  pp.167-174,  2000.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 558
2.

Conference Proceedings
Conference Proceedings
2. Aspects of Enhanced Titanium Salicide Formation
Kappius, L. ; Tung, R.T.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.139-150,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
3.

Conference Proceedings
Conference Proceedings
3. Effect of the Oxidation of a Silicide Layer on Dopant Diffusion in the Underlying Silicon
Kappius, L. ; Tyagi, A. K. ; Breuer, U. ; Bay, H. L. ; Mantl, S.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.225-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568
4.

Conference Proceedings
Conference Proceedings
4. Growth, Patterning and Microelectronic Applications of Epitaxial CobaltDisilicide
Mantl, S. ; Kappius, L. ; Antons, A. ; Loken, M. ; Klinkhammer, F. ; Dolle, M. ; Zhao, Q. T. ; Mesters, S. ; Buchal, Ch. ; Bay, H. L. ; Kabius, B. ; Trinkaus, H. ; Heinig, K. H.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.145-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
5.

Conference Proceedings
Conference Proceedings
5. Nanopatterning of Thin CobaltDisilicide Layers by Local Oxidation
Klinkhammer, F. ; Kappius, L. ; Antons, A. ; Dolle, M. ; Trinkaus, H. ; Mesters, St. ; Bochem, H-P. ; Mantl, S. ; Heinig, K-H.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.163-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
6.

Conference Proceedings
Conference Proceedings
6. On The Template Mechanism Of Enhanced C54-TiSi2 Formation
Kappius, L. ; Tung, R. T.
Pub. info.: Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A..  pp.C8.2-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 611