1.

Conference Proceedings
Conference Proceedings
1. THE INFLUENCE OF A TiN CAP LAYER ON A TITANIUM-SALICIDE PROCESS: TITANIUM VS TITANIUM INTRIDE/TITANIUM
Zhang, S.-L ; Kaplan, W. ; Ostling M, ; Norstrom, H. ; Lindberg, A.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.233-238,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
2.

Conference Proceedings
Conference Proceedings
2. Interdiffusion and Phase Formation During Thermal Annealing of Ti/Mo Bilayers on Si Substrates
Mouroux, A. ; Zhang, S.-L. ; Kaplan, W. ; Nygren, S. ; Ostling, M. ; Petersson, C. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.511-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427