1.

Conference Proceedings
Conference Proceedings
1. PROPERTIES OF SiO2 FILMS FABRICATED BY MICROWAVE ECR PLASMA PROCESSING WITH AND WITHOUT ENERGETIC PARTICLE BOMBARDMENT DURING FILM DEPOSITION. PART II: ELECTRONIC PROPERTIES
Chau, T. T. ; Mejia, S. R. ; Kao, K. C.
Pub. info.: Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.277-282,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 225
2.

Conference Proceedings
Conference Proceedings
2. PROPERTIES OF Si02 FILMS FABRICATED BY MICROWAVE ECR PLASMA PROCESSING WITH AND WITHOUT ENERGETIC PARTICLE BOMBARDMENT DURING FILM DEPOSITION PART I. FABRICATION PROCESSES AND PHYSICAL PROPERTIES
Chau, T. T. ; Mejia, S. R. ; Kao, K. C.
Pub. info.: Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A..  pp.69-74,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 223
3.

Conference Proceedings
Conference Proceedings
3. THE EFFECTS OF DEPOSITION PARAMETERS ON THE PROPERTIES OF SiO2 FILMS DEPOSITED BY MICROWAVE ECR PLASMAS
Chau, T. T. ; Lam, P. M. ; Kao, K. C.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.373-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334