1.

Conference Proceedings
Conference Proceedings
1. Parasitic Channel in SiGe Heterojunction MOSFETs
Hara, Y. ; Inoue, A. ; Takagi, T. ; Kanzawa, Y. ; Kubo, M.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.211-222,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
2.

Conference Proceedings
Conference Proceedings
2. Real-Time Spectroscopic Ellipsometry Study of the Thermal Cleaning Process for Silicon Epitaxial Growth by UHV-CVD
Nozawa, K. ; Katayama, K. ; Kanzawa, Y. ; Sugahara, G. ; Saitoh, T. ; Kubo, M.
Pub. info.: In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A..  pp.83-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 569