1.

Conference Proceedings

Conference Proceedings
Fornaciari, N.R. ; Bender, H. ; Buchenauer, D. ; Dimkoff, J.L. ; Kanouff, M.P. ; Karim, S. ; Romeo, C. ; Shimkaveg, G.M. ; Silfvast, W.T. ; Stewart, K.D.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.110-121,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
2.

Technical Paper

Technical Paper
Knorovsky.G.A. ; MacCallum, D.O. ; Kanouff, M.P. ; Fuerschbach, P.W.
Pub. info.: SME technical paper.  2001.  Society of Manufacturing Engineers