1.

Conference Proceedings

Conference Proceedings
Kim,H.-J. ; Kye,J.-W. ; Lee,D.-Y. ; Woo,S.-G. ; Kang,H.-Y. ; Koh,Y.-B.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.106-114,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
2.

Conference Proceedings

Conference Proceedings
Choi,Y.-S. ; Kang,H.-Y. ; Han,W.-S. ; Koh,Y.-B.
Pub. info.: Optical Microlithography IX.  Part2  pp.508-515,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
3.

Conference Proceedings

Conference Proceedings
Lim,S.-C. ; Kye,J.-W. ; Woo,S.-G. ; Kim,S.-G. ; Kang,H.-Y. ; Han,W.-S. ; Koh,Y.-B.
Pub. info.: Optical Microlithography IX.  Part2  pp.516-523,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
4.

Conference Proceedings

Conference Proceedings
Kim,Y.-C. ; Yeo,G.-S. ; Shin,H.-S. ; Kim,H. ; Kang,H.-Y. ; Chung,U-I.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.629-639,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
5.

Conference Proceedings

Conference Proceedings
Kim,Y.-B. ; Sohn,C.-J. ; Kang,H.-Y. ; Han,W.-S. ; Koh,Y.-B.
Pub. info.: Optical Microlithography IX.  Part2  pp.670-679,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
6.

Conference Proceedings

Conference Proceedings
Oh,H.-K. ; Cho,S.-Y. ; Jeong,Y.-U. ; Kang,H.-Y. ; Lee,G.-S. ; An,I. ; Park,I.-H.
Pub. info.: Optical Microlithography X.  pp.215-224,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
7.

Conference Proceedings

Conference Proceedings
Cha,D.-H. ; Kye,J.-W. ; Seong,N.-G. ; Kang,H.-Y. ; Cho,H.-K. ; Moon,J.-T.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.46-54,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
8.

Conference Proceedings

Conference Proceedings
Seong,N.-G. ; Kye,J.-W. ; Kang,H.-Y. ; Moon,J.-T.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.868-872,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
9.

Conference Proceedings

Conference Proceedings
Kim,H.-J. ; Hong,J.-S. ; Kye,J.-W. ; Cha,D.-H. ; Kang,H.-Y. ; Moon,J.-T.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.430-440,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236