1.

Conference Proceedings
Conference Proceedings
1. Deposition of Yttrium or Lanthanum-Substituted Bismuth Titanate Films by Direct Liquid Injection-Metal Organic Chemical Vapor Deposition for Use in Non-Volatile Memories
Kang, S.-W. ; Rhee, S.-W.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.1419-1425,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
2.

Conference Proceedings
Conference Proceedings
2. Copper Dots Deposition Using New Precuresors [Cu'(hfac)]2(DVTMSO) and [Cu (hfac)]2(HD)
Kang, S.-W. ; Yun, J.-H. ; Rhee, S.-W. ; Krisyuk, V. ; Turgambaeva, A.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.1305-1312,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
3.

Conference Proceedings
Conference Proceedings
3. Growth and Characterization of Ti-Al-N Films Prepared by Plasma-Enhanced Atomic Layer Deposition of TiN and AIN
Lee, Y.J. ; Kang, S.-W.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.1262-1267,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8