1.

Conference Proceedings
Conference Proceedings
1. Atomic Force Microscopy and Transmission Electron Microscopy Study of Self-Organized Ordering in Vertically Aligned PbSe Quantum Dot Superlattices
Raab, A. ; Springholz, G. ; Lechner, R.T. ; Vavra, I. ; Kang, H.H. ; Salamanca-Riba, L.
Pub. info.: Current issues in heteroepitaxial growth--stress relaxation and self assembly : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.  pp.209-214,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 696
2.

Conference Proceedings
Conference Proceedings
2. Total measurement uncertainty and total process precision evaluation of a structural metrology approach to monitoring post-CMP processes
Lu, W. ; Archie, C.N. ; Stone, S. ; Kang, H.H. ; Chitturi, P.R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.503-514,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375