1.

Conference Proceedings
Conference Proceedings
1. A Study of the Planarity by STI CMP Erosion Modeling
Chung, U. I. ; Hah, S. R. ; Han, J. H. ; Hong, C. K. ; Kang, G. W. ; Kim, K. H.
Pub. info.: Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.33-44,  2000.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 566
2.

Conference Proceedings
Conference Proceedings
2. Precision Finishing Combined with ELID and MRF
Kang, G. W. ; Zhang, F. H. ; Dong, S.
Pub. info.: Advances in Materials Manufacturing Science and Technology : selected papers from the 11th International Manufacturing Conference in China September 18th-20th, 2004, Jinan, China.  pp.317-320,  2004.  Zurich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 471-472