1.

Technical Paper

Technical Paper
Kim, C. ; Wang, S. ; Kang, E. ; Lee, K.
Pub. info.: AIAA meeting papers on disc.  2004.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Multidisciplinary Analysis and Optimization Conference
Ser. no.: 10th
2.

Technical Paper

Technical Paper
Kang, E. ; Breuer, K.S. ; Tan, C.S.
Pub. info.: AIAA paper.  pp.1-9,  2000.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Fluids Conference and Exhibit
Ser. no.: 2000
3.

Conference Proceedings

Conference Proceedings
Hwang, Y. S. ; Kang, E. ; Lee, K. ; Ban, K. D ; Bok, C. K. ; Lim, C. M. ; Kim, H. S ; Moon, S. C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615222-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
4.

Conference Proceedings

Conference Proceedings
Hong, J. ; Lee, J. ; Kang, E. ; Yang, H. ; Yim, D. ; Kim, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
5.

Conference Proceedings

Conference Proceedings
Yang, H. ; Park, C. ; Hong, J. ; Jeong, G. ; Cho, B. ; Choi, J. ; Kang, C. ; Yang, K. ; Kang, E. ; Ji, S. ; Yim, D. ; Song, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.437-443,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375