1.

Conference Proceedings
Conference Proceedings
1. The theory of adjustment applied in road data collecting and optimum designing of road [6419-52]
Yao, L. ; Kang, C.
Pub. info.: Geoinformatics 2006 : Remotely sensed data and information : 28-29 October 2006, Wuhan, China.  pp.64191G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6419
2.

Conference Proceedings
Conference Proceedings
2. Redox Mechanisms for the Activation of Dioxygen (02) in the Presence of Iron, Copper and Cobalt Complexes
Sawyer, D.T. ; Kang, C. ; Qiu, A. ; Sobkowiak, A.
Pub. info.: Proceedings of the fifth International Symposium on Redox Mechanisms and Interfacial Properties of Molecules of Biological Importance 1993.  pp.216-231,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-11
3.

Conference Proceedings
Conference Proceedings
3. PsmLint: bringing AltPSM benefits to the IC design stage
Ghosh, P. ; Kang, C. ; Sanie, M. ; Huckabay, J.A.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.314-325,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
4.

Conference Proceedings
Conference Proceedings
4. Process Effects and Characterization of Hf-Based Dielectrics
Lee, J.C. ; Rhee, S. ; Kang, C. ; Choi, C. ; Krishnan, S. ; Ok, I. ; Akbar, M. ; Kim, H. ; Zhu, F. ; Zhang, M. ; Lee, T.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.389-402,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01
5.

Conference Proceedings
Conference Proceedings
5. Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope [5879-37]
Kim, J. -A. ; Kim, J. W. ; Park, C. -S. ; Eom, T. B. ; Kang, C.
Pub. info.: Recent Developments in Traceable Dimensional Measurements III.  pp.58790Z-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5879
6.

Conference Proceedings
Conference Proceedings
6. OPC accuracy and process window verification methodology for sub-100-nm node
Yang, H. ; Park, C. ; Hong, J. ; Jeong, G. ; Cho, B. ; Choi, J. ; Kang, C. ; Yang, K. ; Kang, E. ; Ji, S. ; Yim, D. ; Song, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.437-443,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
7.

Conference Proceedings
Conference Proceedings
7. CD control at low K1 optical lithography in DRAM device
Hong, J. ; Woo, C. ; Park, J. ; Cho, B. ; Choi, J.-S. ; Yang, H. ; Park, C. ; Shin, Y.-C. ; Kim, Y. ; Jeong, G. ; Kim, J. ; Kang, K. ; Kang, C. ; Yim, D. ; Song, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.406-414,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038