1.

Conference Proceedings

Conference Proceedings
Kanayama, T. ; Shimizu, T. ; Kojima, H. ; Omote, N. ; Sunouchi, S. ; Hayashi, K.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.147-151,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
2.

Conference Proceedings

Conference Proceedings
Robinson, A.P.G ; Palmer, R.E. ; Preece, J.A. ; Shelley, E.J. ; Kanayama, T. ; Tada, T.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A..  pp.219-224,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 546
3.

Conference Proceedings

Conference Proceedings
Wada, T. ; Kanayama, T. ; Ichimura, S. ; Sugiyama, Y. ; Komuro, M.
Pub. info.: Physics and applications of defects in advanced semiconductors : symposium held November 29-December 1, 1993, Boston, Massachusetts, U.S.A..  pp.67-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 325
4.

Conference Proceedings

Conference Proceedings
Kanayama, T. ; Omote, N. ; Kajimoto, S. ; Hayashi, K.
Pub. info.: Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan.  pp.412-415,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5662
5.

Conference Proceedings

Conference Proceedings
Hayashi, K. ; Kanayama, T. ; Oseki, T. ; Omote, N.
Pub. info.: Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan.  pp.416-419,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5662
6.

Conference Proceedings

Conference Proceedings
Hayashi, K. ; Konno, H. ; Kojima, H. ; Minato, M. ; Oseki, T. ; Kawamura, Y. ; Kameko, K. ; Kanayama, T.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.142-146,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830