Kanayama, T. ; Shimizu, T. ; Kojima, H. ; Omote, N. ; Sunouchi, S. ; Hayashi, K.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.147-151, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Robinson, A.P.G ; Palmer, R.E. ; Preece, J.A. ; Shelley, E.J. ; Kanayama, T. ; Tada, T.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.. pp.219-224, 1999. Warrendale, Pa.. Materials Research Society
Wada, T. ; Kanayama, T. ; Ichimura, S. ; Sugiyama, Y. ; Komuro, M.
Pub. info.:
Physics and applications of defects in advanced semiconductors : symposium held November 29-December 1, 1993, Boston, Massachusetts, U.S.A.. pp.67-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Kanayama, T. ; Omote, N. ; Kajimoto, S. ; Hayashi, K.
Pub. info.:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.412-415, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hayashi, K. ; Kanayama, T. ; Oseki, T. ; Omote, N.
Pub. info.:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.416-419, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hayashi, K. ; Konno, H. ; Kojima, H. ; Minato, M. ; Oseki, T. ; Kawamura, Y. ; Kameko, K. ; Kanayama, T.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.142-146, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering