1.

Conference Proceedings

Conference Proceedings
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Sakanishi, S. ; Kaminishi, M. ; Watanabe, Y. ; Ohta, T. ; Nakane, M. ; Moriya, M. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M. ; Kawasuji, T. ; Nogawa, H. ; Ito, T. ; Umeda, H. ; Tanaka, S. ; Taniguchi, H. ; Sasaki, Y. ; Kinoshita, J. ; Abe, T. ; Tanaka, H. ; Hayashi, H. ; Miyao, K. ; Niwano, M. ; Kurosu, A. ; Yashiro, M. ; Nagano, H. ; Matsui, N. ; Mimura, T. ; Kakizaki, K. ; Goto, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.69-79,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings

Conference Proceedings
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Suzuki, T. ; Matsunaga, T. ; Sakanish, S. ; Kaminishi, M. ; Watanabe, Y. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M ; Kawasuji, T ; Nogawa, H ; Umeda, H ; Taniguchi, H ; Sasaki, Y ; Kinoshita, J ; Abe T ; Tanaka, H ; Hayashi, H ; Miyao, K ; Niwano, M ; Kurosu, A ; Yashiro, M ; Nagano, H ; Igarashi, T ; Mimura, T ; Kakizaki, K
Pub. info.: Optical Microlithography XIX.  pp.615425-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
3.

Conference Proceedings

Conference Proceedings
Kakizaki, K. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Kawasuji, Y. ; Watanabe, Y. ; Kaminishi, M. ; Inoue, T. ; Mizoguchi, H. ; Kumazaki, T. ; Ariga, T. ; Watanabe, T. ; Yabu, T. ; Sasano, K. ; Hori, T. ; Wakabayashi, O. ; Sumitani, A.
Pub. info.: Optical Microlithography XVII.  pp.1805-1814,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377