1.

Conference Proceedings

Conference Proceedings
Cotofana,C.V.B. ; Bossche,A. ; Mollinger,J.R. ; Kaldenberg,P.
Pub. info.: Micromachined Devices and Components IV.  pp.72-81,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
2.

Conference Proceedings

Conference Proceedings
Bossche,A. ; Cotofana,C.V.B. ; Kaldenberg,P. ; Van Dommelen,I. ; Mollinger,J.R.
Pub. info.: Micromachined Devices and Components III.  pp.153-160,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224