Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.473-482, 1989. Pittsburgh, Pa.. Materials Research Society
Innertsberger, G. ; Jurk, R. ; Felsner, J. ; Kakoschke, R. ; Yuwono, B. ; Schlosser, T. ; Krautschneider, W. ; Gschwandtner, A.
Pub. info.:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.589-, 1999. Warrendale, PA. MRS - Materials Research Society
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.159-170, 1991. Pittsburgh, Pa.. Materials Research Society