1.

Conference Proceedings

Conference Proceedings
Kakoschke, R. ; Buβmann, E.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.473-482,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
2.

Conference Proceedings

Conference Proceedings
Innertsberger, G. ; Jurk, R. ; Felsner, J. ; Kakoschke, R. ; Yuwono, B. ; Schlosser, T. ; Krautschneider, W. ; Gschwandtner, A.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.589-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
3.

Conference Proceedings

Conference Proceedings
Kakoschke, R.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.159-170,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224