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13 results

Conference Proceedings

1. RELIABILITY OF INTERCONNECTS EXHIBITING BIMODAL ELECTROMIGRATION-INDUCED FAILURED DISTRIBUTIONS

Kahn, H. ; Thompson, C. V. ; Cooperman, S. S.

Pub. info.:	Materials reliability in microelectronics II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.65-72, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	265

Conference Proceedings

2. Control of residual stresses in As-grown polysilicon by multi-layer deposition: The "Multipoly" process

Yang, Jie ; Kahn, H. ; He, A. Q. ; Phillips, S. M. ; Heuer, A. H.

Pub. info.:	Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.37-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	605

Conference Proceedings

3. The Fracture Toughness of Polysilicon Microdevices

Ballarini, R. ; Mullen, R. L. ; Kahn, H. ; Heuer, A. H.

Pub. info.:	Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.. pp.137-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	518

Conference Proceedings

4. Polycrystalline Silicon Films for Microelectromechanical Devices

Kahn, H. ; Stemmer, S. ; Mullen, R. L. ; Huff, M. A. ; Heuer, A. H.

Pub. info.:	Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.321-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	403

Conference Proceedings

5. Heating Effects on the Young's Modules of Films Sputtered Onto Micromachined Resonators

Kahn, H. ; Huff, M. A. ; Heuer, A. H.

Pub. info.:	Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.. pp.33-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	518

Conference Proceedings

6. Titanium-Nickel Shape Memory Thin Film Actuators for Micromachined Valves

Kahn, H. ; Benard, W. L. ; Huff, M. A. ; Heuer, A. H.

Pub. info.:	Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.. pp.227-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	444

Conference Proceedings

7. On the Fracture toughness of Polysilicon MEMS Structures

Kahn, H. ; Ballarini, R. ; Heuer, A.H.

Pub. info.:	Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	657

Conference Proceedings

8. The Characterization of TiNi Shape-Memory Actuated Microvalves

Lai, B.-K. ; Hahm, G. ; You, L. ; Shih, C.-L. ; Kahn, H. ; Phillips, S.M. ; Heuer, A.H.

Pub. info.:	Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	657

Conference Proceedings

9. Surface Oxide Effects on Static Fatigue of Polysilicon MEMS

Kahn, H. ; Ballarini, R. ; Heuer, A.H.

Pub. info.:	Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.41-46, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	741

10.

Conference Proceedings

10. Water-level strength and fracture toughness testing of surface-micromachined MEMS devices

Kahn, H. ; Tayebi, N. ; Ballarini, R. ; Mullen, R. L. ; Heuer, A. H.

Pub. info.:	Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.25-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	605

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