Bergunde, T. ; Dauelsberg, M. ; Kadinski, L. ; Makarov, Yu.N. ; Strauch, G. ; Juergensen, H.
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Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.230-237, 1997. Pennington, NJ. Electrochemical Society
Hofmann, D. ; Eckstein, R. ; Kadinski, L. ; Kolbl, M. ; Muller, M. ; Muller, St. G. ; Schmitt, E. ; Weber, A. ; Winnacker, A.
Pub. info.:
Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A.. pp.301-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Wellmann, P. J. ; Bickermann, M. ; Hofmann, D. ; Kadinski, L. ; Selder, M. ; Straubinger, T. L. ; Winnacker, A.
Pub. info.:
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.71-74, 2000. Zuerich, Switzerland. Trans Tech Publications
Straubinger, T. L. ; Bickermann, M. ; Grau, M. ; Hofmann, D. ; Kadinski, L. ; Muller, S. G. ; Selder, M. ; Wellmann, P. J. ; Winnacker, A.
Pub. info.:
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.39-42, 2000. Zuerich, Switzerland. Trans Tech Publications
Selder, M. ; Kadinski, L. ; Durst, F. ; Straubinger, T. L. ; Hofmann, D. ; Wellmann, P. J.
Pub. info.:
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.31-34, 2000. Zuerich, Switzerland. Trans Tech Publications
Wunder, V.K. ; Popovska, N. ; Gerhard, H. ; Emig, G. ; Kadinski, L. ; Durst, F.
Pub. info.:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.300-307, 2001. Pennington, N.J.. Electrochemical Society
Wellmann, P.J. ; Hofmann, D. ; Kadinski, L. ; Selder, M. ; Straubinger, T.L. ; Winnacker, A.
Pub. info.:
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.11-14, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Schmitt, E. ; Rasp, M. ; Weber, A.-D. ; Koelbl, M. ; Eckstein, R. ; Kadinski, L. ; Selder, M.
Pub. info.:
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.15-20, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Selder, M. ; Kadinski, L. ; Durst, F. ; Straubinger, T.L. ; Wellmann, P.J. ; Hofmann, D.
Pub. info.:
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.65-68, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications