1.

Conference Proceedings

Conference Proceedings
S. Lee ; K.-H. Kim ; I.-S. Bae
Pub. info.: Proceedings of the 2001 ASME Fluids Engineering Division Summer Meeting : presented at the 2001 ASME Fluids Engineering Division Summer Meeting, May 29 - June 1, 2001, New Orleans, Louisiana.  1  pp.179-186,  2001.  New York.  American Society of Mechanical Engineers
Title of ser.: ASME Symposia Volumes
Ser. no.: FEDSM 2001(1)
2.

Conference Proceedings

Conference Proceedings
W.-S. Han ; C.-J. Sohn ; Y.-B. Kim ; K.-H. Kim ; H.-K. Kang
Pub. info.: Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California.  pp.494-505,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2440
3.

Conference Proceedings

Conference Proceedings
Y.-M. Kim ; S.-U. Lee ; J.-H. Kang ; J.-H. Kim ; K.-H. Kim
Pub. info.: Photomask technology 2007.  3  pp.67303W-1-67303W-7,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
4.

Conference Proceedings

Conference Proceedings
E.-J. Kim ; K.-H. Kim ; H.-R. Park ; J.-Y. Yeo ; J.-S. Kim
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.69223X-1-69223X-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922