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Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California. pp.494-505, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
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Proceedings of SPIE - the International Society for Optical Engineering
E.-J. Kim ; K.-H. Kim ; H.-R. Park ; J.-Y. Yeo ; J.-S. Kim
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Metrology, inspection, and process control for microlithography XXII. 2 pp.69223X-1-69223X-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
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Proceedings of SPIE - the International Society for Optical Engineering