1.

Conference Proceedings

Conference Proceedings
K. Oda ; M. Miura ; H. Shimamoto ; K. Washio
Pub. info.: SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices.  pp.1089-1094,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(10)
2.

Conference Proceedings

Conference Proceedings
K. Murata ; K. Washio ; N. Miyatake ; Y. Mori ; H. Tachibana
Pub. info.: Atomic layer deposition applications 3.  pp.31-38,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(7)
3.

Conference Proceedings

Conference Proceedings
T. Masuda ; N. Shiramizu ; T. Nakamura ; K. Washio
Pub. info.: ULSI process integration 5.  pp.433-444,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)