1.
Conference Proceedings
J. Kim ; J. McVittie ; K. Saraswat ; Y. Nishi ; S. Liu
Pub. info.:
SiGe and Ge, materials, processing, and devices . pp.1191-1196, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
3(7)
2.
Conference Proceedings
K. Saraswat
Pub. info.:
SiGe and Ge, materials, processing, and devices . pp.817-821, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
3(7)
3.
Conference Proceedings
T. Krishnamohan ; D. Kim ; Y. Nishi ; K. Saraswat ; C. Jungemann
Pub. info.:
SiGe and Ge, materials, processing, and devices . pp.687-695, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
3(7)
4.
Conference Proceedings
T. Krishnamohan ; A. Pham ; C. Jungemann ; B. Meinerzhagen ; K. Saraswat
Pub. info.:
SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices . pp.397-403, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
16(10)
5.
Conference Proceedings
D. Kim ; T. Krishnamohan ; K. Saraswat
Pub. info.:
SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices . pp.47-55, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
16(10)
6.
Conference Proceedings
K. Saraswat ; D. Kim ; T. Krishnamohan ; D. Kuzum ; A.K. Okyay
Pub. info.:
SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices . pp.3-12, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
16(10)
7.
Conference Proceedings
J. Kim ; K. Saraswat ; Y. Nishi
Pub. info.:
Cleaning Technology in Semiconductor Device Manufacturing IX . pp.214-219, 2006. Pennington, NJ. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
1(3)
8.
Conference Proceedings
H. Cho ; P. Kapur ; P. Kalavade ; K. Saraswat
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment . pp.403-414, 2006. Pennington, NJ. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
3(2)
9.
Conference Proceedings
H. Yu ; J. Park ; A.K. Okyay ; K. Saraswat
Pub. info.:
SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices . pp.823-828, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
16(10)