1.

Conference Proceedings
Conference Proceedings
1. Damage Clustering and Damage-Size Distributions After Megasonic Cleaning
C. De Marco ; K.L. Wostyn ; T. Bearda ; K. Sano ; K. Kenis
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.87-93,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
2.

Conference Proceedings
Conference Proceedings
2. Particle Removal from Micrometer-Sized Trenches Using High-Velocity-Aerosol Cleaning and Comparison with Megasonic Tank Cleaning
K.L. Wostyn ; K. Sano ; A. Eitoku ; T. Janssens ; T. Bearda
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.55-60,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
3.

Conference Proceedings
Conference Proceedings
3. SINGLE - WAFER WET CLEANING FOR A HIGH PARTICLE REMOVAL EFFICIENCY ON HYDROPHOBIC SURFACE
K. Sano ; A. Izumi ; A. Eitoku ; J. Snow ; E. Kesters ; P. Mertens
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.134-141,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
4.

Technical Paper
Technical Paper
4. Parallel-Implicit Computation of Three-dimensional Multistage Stator-Rotor Cascade Flows with Condensation
S. Yamamoto ; Y. Sasao ; S. Sato ; K. Sano
Pub. info.: AIAA meeting papers on disc.  2007.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA Computational Fluid Dynamics Conference
Ser. no.: 2007