1.
Conference Proceedings
Lee, D.-Y. ; Kim, I.-S. ; Jung, S.-G. ; Jung, M.-H. ; Park, J.-O. ; Oh, S.-H. ; Woo, S.-G. ; Cho, H.-K. ; Moon, J.-T.
Pub. info.:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA . pp.119-128, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
2.
Conference Proceedings
Jung, M.-H. ; Yoon, S. ; Chung, E.-S. ; Yoo, B.-S. ; Ya, J.Y. ; Winning, D. ; Kim, B.D. ; Lee, H. ; Kim, D.Y. ; Kim, Y.H. ; Kim, M. ; Chon, S.-M.
Pub. info.:
Advances in Resist Technology and Processing XXI . pp.703-710, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
3.
Conference Proceedings
Jung, M.-H. ; Kim, H.-W. ; Hong, J. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.:
Advances in Resist Technology and Processing XXI . pp.1100-1106, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
4.
Conference Proceedings
Jung, M.-H. ; Lee, S.-H. ; Kim, H.-W. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.:
Advances in Resist Technology and Processing XX . 2 pp.1298-1303, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5039