1.

Conference Proceedings
Conference Proceedings
1. Plasma Chemistries for Etching of La0.41Ca0.59MnO3 and SmCo CMR Structures
Wang, J. J. ; Jung, K. B. ; Childress, J. R. ; Pearton, S. J. ; Sharifi, F. ; Dahmen, K. H. ; Gillman, E. S. ; Cadieu, F. J. ; Rani, R. ; Qian, X. R. ; Chen, Li
Pub. info.: High-density magnetic recording and integrated magneto-optics, materials and devices : symposium held April 12-16, 1998, San Francisco, California, U.S..  pp.141-,  1998.  Warrendale, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 517
2.

Conference Proceedings
Conference Proceedings
2. Inductively-Coupled Plasma Etching of NiFe and NiFeCo
Jung, K. B. ; Childress, J. R. ; Pearton, S. J. ; Jenson, M. ; Hurst, A. T., Jr. ; Johnson, D.
Pub. info.: High-density magnetic recording and integrated magneto-optics, materials and devices : symposium held April 12-16, 1998, San Francisco, California, U.S..  pp.79-,  1998.  Warrendale, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 517
3.

Conference Proceedings
Conference Proceedings
3. High density dry-etching of (Ba,Sr) TiO3 and LaNiO3
Lee, K. P. ; Jung, K. B. ; Srivastava, A. ; Kumar, D. ; Singh, R. K. ; Pearton, S. J.
Pub. info.: Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.91-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 596
4.

Conference Proceedings
Conference Proceedings
4. Inductively Coupled Plasma Etching of III-Nitrides in Cl2/Xe, Cl2/Ar and Cl2/He
Cho, H. ; Hahn, Y. B. ; Hays, D. C. ; Jung, K. B. ; Donovan, S. M. ; Abernathy, C. R. ; Pearton, S. J. ; Shul, R. J.
Pub. info.: GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A..  pp.G6.56.1-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 537
5.

Conference Proceedings
Conference Proceedings
5. Dry etching to form submicron features in CMR oxides: (Pr, Ba,Ca)MnO3 and (La,Sr)MnO3
Lee, K. P. ; Jung, K. B. ; Cho, H. ; Kumar, D. ; Pietambaram, S. V. ; Singh, R. K. ; Hogan, P. H. ; Dahmen, K. H. ; Hahn, Y. B. ; Pearton, S. J.
Pub. info.: Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A..  pp.341-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 574
6.

Conference Proceedings
Conference Proceedings
6. Ion-enhanced dry etching of magnetic multilayers: Post-etch cleaning and effects of UV illumination
Cho, H. ; Lee, K. P. ; Jung, K. B. ; Sharifi, F. ; Marburger, J. ; Pearton, S. J.
Pub. info.: Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.123-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 585