1.
Conference Proceedings |
1. Feasibility of Detecting Barrier Layer to Low-K Transition in Copper CMP Using Raman Spectroscopy
Kondoju, S. ; Juncker, C. ; Lucas, P. ; Raghavan, S. ; Fischer, P. ; Moinpour, M. ; Oehler, A.
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2.
Conference Proceedings |
Lucas, P. ; Riley, M. R. ; Solis, M. A. ; Juncker, C. ; Collier, J. ; Boesewetter, D. E.
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