1.

Conference Proceedings
Conference Proceedings
1. Calibration strategies for overlay and registration metrology
Silver, R.M. ; Stocker, M.T. ; Attota, R. ; Bishop, M. ; Jun, J.-S.J. ; Marx, E. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.103-120,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings
Conference Proceedings
2. New method to enhance overlay tool performance
Attota, R. ; Silver, R.M. ; Stocker, M.T. ; Marx, E. ; Jun, J.-S.J. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.428-436,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
3.

Conference Proceedings
Conference Proceedings
3. High-resolution optical overlay metrology
Silver, R.M. ; Attota, R. ; Stocker, M. ; Bishop, M. ; Jun, J.-S.J. ; Marx, E. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.78-95,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
4.

Conference Proceedings
Conference Proceedings
4. Evaluation of new in-chip and arrayed line overlay target designs
Attota, R. ; Silver, R.M. ; Bishop, M. ; Marx, E. ; Jun, J.-S.J. ; Stocker, M. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.395-402,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375