1.

Conference Proceedings
Conference Proceedings
1. HYDROGENATED SILICON FILMS PREPATED BY REMOTE PLASMA CVD
Kim, S. C ; Lee, S. K. ; Soe, S. M. ; Koh, S. O. ; Ihm, S. S. ; Jun, J. M. ; Kim, T. G. ; Chung, M. H. ; Lee, K. H. ; Song, H. K. ; Jang, J. ; Hwang, J. T. ; Chung, K. S.
Pub. info.: Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A..  pp.577-582,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 192
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of Undoped and N+ Microcrystalline Si Films Using SiH2Cl2
Byun, J. S. ; Jeon, H. B. ; Jun, J. M. ; Yoo, J. H. ; Lee, K. H. ; Park, M. ; Jang, J.
Pub. info.: Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A..  pp.75-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 377