1.

Conference Proceedings

Conference Proceedings
Ko, Y.-U. ; Joy, D.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.565-575,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings

Conference Proceedings
Frost, B.G. ; Joy, D.C. ; Thesen, A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.576-583,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
3.

Conference Proceedings

Conference Proceedings
Joy, D.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.1-10,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
4.

Conference Proceedings

Conference Proceedings
Rack, P.D. ; Thesen, A. ; Randolph, S. ; Fowlkes, J.D. ; Joy, D.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.943-949,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
5.

Conference Proceedings

Conference Proceedings
Geohegan, D.B. ; Puretzky, A.A. ; Schittenhelm, H. ; Fan, X. ; Britt, P.F. ; Guillorn, M.A. ; Simpson, M.L. ; Merkulov, V.I. ; Austin, D.W. ; Pennycook, S.J. ; Joy, D.C.
Pub. info.: ALT'01 International Conference on Advanced Laser Technologies, 11-14 September, 2001, Constanta, Romania.  pp.268-277,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4762
6.

Conference Proceedings

Conference Proceedings
Geohegan, D.B. ; Puretzky, A.A. ; Schittenhelm, H. ; Fan, X. ; Britt, P.F. ; Guillorn, M.A. ; Simpson, M.L. ; Merkulov, V.I. ; Austin, D.W. ; Pennycook, S.J. ; Joy, D.C.
Pub. info.: Nanoscience Using Laser-Solid Interactions.  pp.1-10,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4636
7.

Conference Proceedings

Conference Proceedings
Ko, Y.-U. ; Joy, D.C. ; Hector, S.D. ; Lu, B.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.293-302,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
8.

Conference Proceedings

Conference Proceedings
Allgair, J.A. ; Boksha, V.V. ; Bunday, B.D. ; Diebold, A.C. ; Cole, D.C. ; Davidson, M.P. ; Hutcheson, J.D. ; Gurnell, A.W. ; Joy, D.C. ; McIntosh, J.M. ; Muckenhirn, S.G. ; Pellegrini, J.C. ; Larrabee, R.D. ; Potzick, J.E. ; Vlada, A.E. ; Smith, N.P. ; Starikov, A. ; Sulivan, N.T. ; Wells, O.C.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.251-277,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
9.

Conference Proceedings

Conference Proceedings
Joy, D.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.10-17,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
10.

Conference Proceedings

Conference Proceedings
Phillips, Julia M. ; Hensel, J.C. ; Joy, D.C. ; Augustyniak, W.M.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.609-614,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74