Yu, J.E. ; Jones, K.S. ; Fang, J. ; Holloway, P.H. ; Pathangey, B. ; Bretschneider, E. ; Anderson, T.J.
Pub. info.:
Wide band gap semiconductors : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.215-220, 1992. Pittsburgh, Pa.. Materials Research Society
Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.489-494, 1989. Pittsburgh, Pa.. Materials Research Society
Advanced surface processes for optoelectronics : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.97-104, 1988. Pittsburgh, Pa.. Materials Research Society
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.116-126, 1996. Pennington, NJ. Electrochemical Society
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.337-347, 1996. Pennington, NJ. Electrochemical Society
Earles, S.K. ; Law, Mark E. ; Jones, K.S. ; Brindos, Rich ; Talwar, Somit
Pub. info.:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B10.4-, 2001. Warrendale, PA. Materials Research Society
Banisaukas, Heather Brye ; Jones, K.S. ; Talwar, Somit ; Falk, S. ; Downey, D.F.
Pub. info.:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B10.2-, 2001. Warrendale, PA. Materials Research Society
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B10.1-, 2001. Warrendale, PA. Materials Research Society