Johnson, A.D. ; Entley, W.R. ; Vrtis, R.N. ; Langan, J. ; Maroulis, P. ; Chen, C.M. ; Chen, C.T. ; Chang, Y.C. ; Yam, O.H.
Pub. info.:
Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium. pp.21-32, 2000. Pennington, NJ. Electrochemical Society
Johnson, A.D. ; Coronell, D.G. ; Zatko, D.A. ; Chen, M.S.K. ; Martinez de Pinillos, J.V.
Pub. info.:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.406-417, 1994. Pennington, NJ. Electrochemical Society
Johnson, A.D. ; Perrin, J. ; Mucha, J.A. ; Ibbotson, D.E.
Pub. info.:
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.451-456, 1993. Pittsburgh, Pa.. Materials Research Society
AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California. 1994. New York. American Institute of Chemical Engineers