Blank Cover Image

*INTERFACIAL MICROSTRUCTURE AND CARRIER CONDUCTION PROCESS IN Pt/Ti OHMIC CONTACT TO p-In0.53Ga0.47As FORMED BY RAPID THERMAL PROCESSING

Author(s):
Chu, S. N. G.
Katz, A.
Boone, T.
Thomas, P. M.
Riggs, V. G.
Dautremont-Smith, W. C.
Johnson Jr., W. D.
2 more
Publication title:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
181
Pub. Year:
1990
Page(from):
389
Page(to):
400
Pages:
12
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990708 [1558990704]
Language:
English
Call no.:
M23500/181
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings MICROSTRUCTURE, STRESS AND ELECTRICAL PROPERTIES OF THE HIGHLY STABLE W/p+-In0.53Ga0.47As OHMIC CONTACTS

Katz, A., Maher, D., Thomas, P.M., Weir, B.E., Dautremont-Smith, W.C., Kimerling, L.C.

Materials Research Society
7 Conference Proceedings Carrier Transport in Ordered and Disordered In0.53Ga0.47As

Ahrenkiel, R. K., Ahrenkiel, S. P., Arent, D. J., Olson, J. M., Wanlass, M.

MRS - Materials Research Society
2 Conference Proceedings Pt/Ti LOW RESISTANCE NON-ALLYED OHMIC CONTACTS TO InP-BASED PHOTONIC DEVICES

Katz, A., Chu, S. N. G., Thomas, P. M, Dautremont-Smith, W. C.

Materials Research Society
8 Conference Proceedings RAPID THERMAL ANNEALING OF Be IMPLANTED In(0.53) Ga (0.47) As

Lam, C.S., Fonstad, C.G.

Materials Research Society
3 Conference Proceedings Shallow and Low-Resistive Ohmic Contacts to p-In0.53Ga0.47As Based on Pd/Au and Pd/Sb Metallizations

Ressel, P., Wang, L. C., Park, M. H., Leech, P. W., Reeves, G. K., Kuphal, E.

MRS - Materials Research Society
9 Conference Proceedings ELECTRICAL TRANSPORT THROUGH METAL CONTACTS TO In0.53Ga0.47aS THIN FILMS

Lu, P. F., Tsui, D. C., Cox, H. M.

Materials Research Society
4 Conference Proceedings ELECTRICAL PROPERTIES OF n- AND p-TYPE In0.53Ga0.47 As LAYERS FORMED BY ION IMPLANTATION AND RAPID THERMAL (FLASH) ANNEAL

L:iu, S. G., Narayan, S. Y., Magee, C. W., Wu, C. P., Kolondra, F., Paczkowski, J., Capewell, D.

Materials Research Society
10 Conference Proceedings Fabrication and Investigation of the Metal-Ferroelectric-Semiconductor Structure With Pb(Zr0.53Ti0.47)O3 on AlxGa1-xN/GaN Heterostructures

Shen, B., Li, W.P., Wang, X.S., Yan, F., Zhang, R., Bi, Z.X., Shi, Y., Liu, Z.G., Zheng, Y.D., Someya, T., Arakawa, Y.

Materials Research Society
5 Conference Proceedings Thermal Stability in Pd-Based Contacts to p-Type In0.53Ga0.47 As Characterized by RBS

Leech, P. W., Ressel, P., Reeves, G. K., Zhou, W., Kuphal, E.

MRS - Materials Research Society
11 Conference Proceedings Far Infrared Spectroscopy of In0.53Ga0.47As Quantum Wells on InP(100)

Rowell, N.L., Lockwood, D.J., Poole, P.J., Yu, G.

Materials Research Society
6 Conference Proceedings "Ferroelectric Pb(Zr0.53, Ti0.47)O3 thin films for smart MEMS"

Maeda,R., Wang,Z., Chu,J., Lin,W.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings STUDIES OF In0.53Ga0.47As/InP SUPERLATTICES MIXING AND CONVERSION

Schwarz, S. A., Mei, P., Hwang, D. M., Schwartz, C. L., Venkatesan, T., Palmstrom, c. J., Stoffel, N. G., Bhat, R.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12