1.

Conference Proceedings

Conference Proceedings
Jeong,W.G. ; Lee,S.W. ; Kim,D.H. ; Yoon,Y.J. ; Lee,D.H. ; Choi,B.Y. ; Choi,S.-S. ; Jung,S.M. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.99-110,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
2.

Conference Proceedings

Conference Proceedings
Yoon,S.-Y. ; Cha,H.-S. ; Choi,S.-J. ; Jung,S.-M. ; Choi,S.-S. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1017-1025,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
3.

Conference Proceedings

Conference Proceedings
Kwon,H.-J. ; Min,D.-S. ; Jang,P.-J. ; Chang,B.-S. ; Choi,B.-Y. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.79-87,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
4.

Conference Proceedings

Conference Proceedings
Cha,H.-S. ; Choi,S.-J. ; Yoon,S.-Y. ; Jung,S.-M. ; Choi,S.-S. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1008-1016,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
5.

Conference Proceedings

Conference Proceedings
Kwon,H.-J. ; Min,D.-S. ; Jang,P.-J. ; Chang,B.-S. ; Choi,B.-Y. ; Park,K.-H. ; Jeong,S.-H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  4409  pp.382-389,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
6.

Conference Proceedings

Conference Proceedings
Kwon,H.-J. ; Chang,B.-S. ; Choi,B.-Y. ; Park,K.-H. ; Jeong,S.-H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.218-225,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
7.

Conference Proceedings

Conference Proceedings
Kwon,H.-J. ; Oh,K.-S. ; Chang,B.-S. ; Choi,B.-Y. ; Park,K.-H. ; Jeong,S.-H.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  4186  pp.532-539,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
8.

Conference Proceedings

Conference Proceedings
Lee,D.H. ; Kim,D.W. ; Lee,J.K. ; Jeong,W.G. ; Choi,S.-S. ; Jung,S.-M. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.571-576,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
9.

Conference Proceedings

Conference Proceedings
Choi,S.J. ; Cha,H.-S. ; Yoon,S.-Y. ; Jung,S.-M. ; Choi,S.-S. ; Jeong,S.-H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.561-570,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
10.

Conference Proceedings

Conference Proceedings
Son,Y.-S. ; Jeong,S.-H. ; Kim,J.-B. ; Kim,H.-S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.416-423,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066