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Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.77-83, 1999. Pennington, NJ. Electrochemical Society
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Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.521-, 1999. Warrendale, PA. MRS - Materials Research Society
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Tuning the Optical Response of Photonic Bandgap Structures. pp.156-164, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering