1.

Conference Proceedings

Conference Proceedings
D'Amico,J. ; Jastrzebski,L. ; Wilson,M. ; Savtchouk,A.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.124-135,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884
2.

Conference Proceedings

Conference Proceedings
Jastrzebski,L. ; Edelman,P. ; Lagowski,J.J. ; Hoff,A.M. ; Savchouk,A. ; Persson,E.
Pub. info.: Optical characterization techniques for high-performance microelectronic device manufacturing III.  pp.207-217,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2877
3.

Conference Proceedings

Conference Proceedings
Edelman,P. ; Savchouk,A. ; Wilson,M. ; Jastrzebski,L. ; Lagowski,J.J. ; Nauka,K. ; Ma,S. ; Hoff,A.M. ; DeBusk,D.K.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II :23-24 September 1998 Santa Clara, California.  pp.126-136,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3509
4.

Conference Proceedings

Conference Proceedings
Burke,P. ; Lowell,J.K. ; Jastrzebski,L.
Pub. info.: Optical Characterization Techniques for High-P6rfo「nwic6 Microelectronic Device Manufacturing II.  pp.27-37,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2638
5.

Conference Proceedings

Conference Proceedings
Ostapenko,S. ; Koshka,Y. ; Jastrzebski,L. ; Smeltzer,R.K.
Pub. info.: Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California.  pp.176-183,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3014
6.

Conference Proceedings

Conference Proceedings
Marinskiy,D.N. ; Lagowski,J.J. ; Wilson,M. ; Jastrzebski,L. ; Santiesteban,R. ; Elshot,K.
Pub. info.: Process Control and Diagnostics.  4182  pp.72-77,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4182
7.

Conference Proceedings

Conference Proceedings
Ostapenko,S.S. ; Savchuk,A.U. ; Nowak,G. ; Lagowski,J. ; Jastrzebski,L.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1897-1902,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201