A study of Cr to Mosi in situ dry etching process to reduce plasma induced defect [5992-25]
- Author(s):
Jang, I. -Y. Park, Y. -J. Kwon, H. -J. Moon, S. -Y. Choi, S. -W. Han, W. S. ( Samsung Electronics Co., Ltd (South Korea) ) - Publication title:
- 25th Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5992
- Pub. Year:
- 2005
- Pt.:
- 1
- Page(from):
- 59920O
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460141 [0819460141]
- Language:
- English
- Call no.:
- P63600/5992
- Type:
- Conference Proceedings
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