1.

Conference Proceedings
Conference Proceedings
1. Holographic fabrication of photonic nanostructures for optofluidic integration
S.-K. Lee ; S.-G. Park ; J.-H. Kang ; J. H. Moon ; S.-M. Yang
Pub. info.: Nanoengineering : fabrication, properties, optics, and devices IV : 27-30 August 2007, San Diego, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6645
2.

Conference Proceedings
Conference Proceedings
2. Comparative study of binary intensity mask and attenuated phase shift mask using hyper-NA immersion lithography for sub-45nm era
T.-S. Eom ; J.-T. Park ; J.-H. Kang ; S. Park ; S. Koo
Pub. info.: Optical Microlithography XXI.  1  pp.69240H-1-69240H-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
3.

Conference Proceedings
Conference Proceedings
3. A study of haze generation as thin film materials
J.-H. Kang ; H.-S. Cha ; S.-J. Yang ; C.-K. Yang ; J.-H. Ahn
Pub. info.: Photomask technology 2007.  3  pp.67304K-1-67304K-12,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
4.

Conference Proceedings
Conference Proceedings
4. Application of modified jog-fill DRC rule on LFD OPC flow
Y.-M. Kim ; S.-U. Lee ; J.-H. Kang ; J.-H. Kim ; K.-H. Kim
Pub. info.: Photomask technology 2007.  3  pp.67303W-1-67303W-7,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
5.

Conference Proceedings
Conference Proceedings
5. Investigation of airborne molecular contamination adsorption rate as storage materials in mask
C.-K. Yang ; H.-S. Cha ; S.-J. Yang ; J.-H. Kang ; J.-H. Ahn
Pub. info.: Photomask technology 2007.  1  pp.67301D-1-67301D-11,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
6.

Conference Proceedings
Conference Proceedings
6. The behavior of substrate dependency as surface treatment in the positive chemically amplified resist
S.-J. Yang ; H.-S. Cha ; J.-H. Kang ; C.-K. Yang ; J.-H. Ahn
Pub. info.: Photomask technology 2007.  1  pp.67300J-1-67300J-12,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730