1.

Conference Proceedings
Conference Proceedings
1. Design of Large-Scale, High-Efficient, Vertical Wind Turbine
S. Lee ; W.-S. Song ; H.-R. Kim ; J.-G. Park
Pub. info.: ASME JSME 2007 5th Joint Fluids Engineering Conference (FEDSM2007).  2B  pp.1095-1102,  2007.  New York.  American Society of Mechanical Engineers
Title of ser.: ASME Symposia Volumes
Ser. no.: FEDSM 2007(2B)
2.

Conference Proceedings
Conference Proceedings
2. NANOSCALE PARTICLES REMOVAL ON AN EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) MASK LAYER BY LASERSHOCK CLEANING
S.-H. Lee ; S.-H Lee ; J.-G. Park ; A. A. Busnaina ; J.-M. Lee ; T.-H. Kim ; G. Zhang ; F. Eschbach ; A. Ramamoorthy
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.26-32,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
3.

Conference Proceedings
Conference Proceedings
3. EFFECT OF CORROSION INHIBITOR, lH-BENZOTRJAZOLE (BTAH) ON PARTICLE ADHESION IN Cu CMP
J.-H. Song ; Y.-K. Hong ; T.-G. Kim ; Y.-J. Kang ; I.-K. Kim ; J.-H. Han ; J.-G. Park ; A. A. Busnaina
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.341-348,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
4.

Conference Proceedings
Conference Proceedings
4. THE EFFECTS OF pH ADJUSTORS IN POST Cu CMP CLEANING SOLUTIONS ON PARTICLE ADHESION AND REMOVAL
Y.-K. Hong ; J.-H. Song ; Y.-J. Kang ; I.-K. Kim ; J.-G. Park ; H.-S. Song ; K.-S. Kim ; J.-J. Myung ; H.-J. Lee ; S.-Y. Song
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.333-340,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
5.

Conference Proceedings
Conference Proceedings
5. Synthesis of composite particulates with tailored morphologies using dry particle coating
J.-B. Jun ; J.-H. Lee ; J.-G. Park ; J.-G. Koo ; J.-I. Kim
Pub. info.: New developments and application in chemical reaction engineering : proceedings of the 4th Asia-Pacific Chemical Reaction Engineering Symposium (APCRE '05) : Gyeongju, Korea, June 12-15, 2005.  pp.765-768,  2006.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 159
6.

Conference Proceedings
Conference Proceedings
6. Systematic defect inspection and verification for distributions of critical dimension in OPC models utilizing design based metrology tool
J.-G. Park ; S. Lee ; Y.-S. Kang ; Y.-K. Park ; T. Kitamura
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.69222C-1-69222C-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922